EC > Gate 2013 SET-2 > IC Fabrication
In IC technology, dry oxidation (using dry oxygen) as compared to wet oxidation (using steam or water vapor) produces
A
superior quality oxide with a higher growth rate
B
inferior quality oxide with a higher growth rate
C
inferior quality oxide with a lower growth rate
D
superior quality oxide with a lower growth rate

Correct : d

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dry oxidation vs wet oxidation IC technology GATE EC 2013 oxide growth rate dry oxidation benefits wet oxidation comparison EC gate 2013 oxide quality growth rate

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