EC > GATE 2013 SET-1 > IC Fabrication

Contributed by: Dr. Sarah Chen

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In IC technology, dry oxidation (using dry oxygen) as compared to wet oxidation (using steam or water vapor) produces

A

superior quality oxide with a higher growth rate

B

inferior quality oxide with a higher growth rate

C

inferior quality oxide with a lower growth rate

D

superior quality oxide with a lower growth rate

Check Answer

Explanation

Correct : d

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